Nitinol (NiTi) Thin Film Deposition

DESCRIPTION

Nitinol, an alloy of Ni and Ti, exhibits outstanding shape memory and super-elastic properties based on its composition. It is an interesting candidate for a multitude of applications ranging from large-scale components used in aviation and automotive industries to small-scale structures, such as micro-sensors and stents due to its unique properties such as high corrosion and wear resistance, large recoverable strain up to 10%, and biocompatibility.

APPLICATIONS

• Pressure sensors
• Accelerometers
• Gyroscope
• Temperature sensors
• Biomedical devices

OPTIONS

• Deposition Thickness: between 0.8 to 10 µm
• Compatible Substrates requirements:
• Material: Si and Sapphire
• Maximum Substrate size: 4” in diameter

PUBLICATIONS

• https://doi.org/10.1016/j.matlet.2008.03.028
• https://doi.org/10.1016/j.jvs.2009.03.028