Terfenol-D Thin Film Deposition
DESCRIPTION
Terfenol-D, an intermetallic compound of Fe-Tb-Dy, is a well-known magnetoelastic material. It plays a key role in both direct and converse multiferroic applications due to its strong coupling between magnetization and strain. In comparison with bulk Terfenol-D, thin film Terfenol-D has distinctive advantages such as CMOS compatible fabrication process, improved ductility, moderately hard magnetic properties, etc.
APPLICATIONS
- Acoustic devices (e.g. sonar and speakers)
- Magnetometers
- Micro magnetorhelogical fluid control
- Inductive charging
- Energy harvesting
- CMOS integration
OPTIONS
- Deposition Thickness: between 50 to 200 nm
- Compatible Substrates requirements:
- Material: Si, Sapphire and PMN-PT
- Maximum Substrate size: 4” in diameter
- Maximum Substrate thickness: 500um
PUBLICATIONS
AGC20.001.01

Product Category: Material Fabrication