Terfenol-D Thin Film Deposition

DESCRIPTION

Terfenol-D, an intermetallic compound of Fe-Tb-Dy, is a well-known magnetoelastic material. It plays a key role in both direct and converse multiferroic applications due to its strong coupling between magnetization and strain. In comparison with bulk Terfenol-D, thin film Terfenol-D has distinctive advantages such as CMOS compatible fabrication process, improved ductility, moderately hard magnetic properties, etc.

APPLICATIONS

  • Acoustic devices (e.g. sonar and speakers)
  • Magnetometers
  • Micro magnetorhelogical fluid control
  • Inductive charging
  • Energy harvesting
  • CMOS integration

OPTIONS

  • Deposition Thickness: between 50 to 200 nm
  • Compatible Substrates requirements:
  • Material: Si, Sapphire and PMN-PT
  • Maximum Substrate size: 4” in diameter
  • Maximum Substrate thickness: 500um

PUBLICATIONS

AGC20.001.01
terfenol-D