Terfenol-D Thin Film Deposition

DESCRIPTION

Terfenol-D, an intermetallic compound of Fe-Tb-Dy, is a well-known magnetoelastic material. It plays a key role in both direct and converse multiferroic applications due to its strong coupling between magnetization and strain. In comparison with bulk Terfenol-D, thin film Terfenol-D has distinctive advantages such as CMOS compatible fabrication process, improved ductility, moderately hard magnetic properties, etc.

APPLICATIONS

• Acoustic devices (e.g. sonar and speakers)
• Magnetometers
• Micro magnetorhelogical fluid control
• Inductive charging
• Energy harvesting
• CMOS integration

OPTIONS

• Deposition Thickness: between 50 to 200 nm
• Compatible Substrates requirements:
• Material: Si, Sapphire and PMN-PT
• Maximum Substrate size: 4” in diameter
• Maximum Substrate thickness: 500um

PUBLICATIONS

• https://doi.org/10.1063/1.5006676
• https://doi.org/10.1063/1.4930602